Purity of copper films by evaporation and sputtering.
(a) Discuss three factors that af...
Engineering, 21.03.2020 08:24 Isabella1319
Purity of copper films by evaporation and sputtering.
(a) Discuss three factors that affect the purity of copper films when deposited by evaporation from a tungsten filament.
(b) Discuss three factors that affect the purity of copper films when deposited by argon sputtering of a copper target.
Answers: 1
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