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Consider a square silicon proof mass with four silicon tethers. The proof mass is 200 μm
x 200 μm x 100 μm, length and width of the tethers are 200 μm and 5 μm, and thickness
of the tether is 1 μm. Assume that Young’s modulus of silicon is 160 GPa. This is used as
an accelerometer and it is designed in such a way that applied acceleration/deceleration
pulls the plate up/down.
1.Calculate the effective spring constant in the direction of acceleration.
2. And calculate the amount of displacement at the center point of the proof mass with 10g acceleration.